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2.6 Structure of nanomaterials
2D nanomaterials - synthesis
• Epitaxy:
• thin orientated layers of similar crystal structures
• e.g. InAs: a=603,6 pm on GaAs: a=565,4 pm, both sphalerite structures
• CVD (Chemical Vapour Deposition)
• decomposition of molecules in the gas phase by electron beam or laser
• deposition on suitable substrates
• e.g. fabrication of LEDs with GaP and GaAs P ,
1-x
x
epitaxial layers are produced by thermal decomposition
of compounds like AsH , AsCl , PH , PCl , ...
3
3
3
3
• MBE
Production of a Ga Al As
1-x
x
on GaAs by the MBE process