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2.6 Structure of nanomaterials
0D nanomaterials – synthesis by MBE
• substrate wafers transferred to
high vacuum growth chamber
• elements kept in effusion cells at
high temperatures
• shutters over cells open to release
vaporized elements, which deposit
on sample
• temperature of each K-Cell
controls the rate of deposition of
that element (Ga, In, Al, etc.)
• precise control over temperatures
and shutters allows very thin
layers to be grown (~1 ML/sec)
• RHEED patterns indicate surface
morphology (Reflection High
Energy Electron Diffraction)
